Glass Interposer /
Substrate for AI
-
SPP-500
Single Panel Processer (Max. Panel 510x515 ㎟)
Features
- Flexible configuration (Max 4 chambers)
- Compact Footprint
- Better Uniformity (≤ 2%)
- Minimized Cross Contamination
- Reduced Chemical Consumption
- Acid, Alkali and Solvent Processes
Application
- TGV Wet Etching
- Seed Layer Etching
- DFR/PR Strip
- DFR/PR Development
- PI Development
- Pre/Post Wet Cleaning